ME8254: Fundamentals of Microelectromechanical Systems (MEMS)

4 Credits

Major classes, components, and applications of MEMS. Principles behind operation of MEMS devices/ systems. Standard microfabrication techniques. Unique requirements, environments, and applications of MEMS. Students apply microfabrication techniques/applications to design/manufacture of a MEMS device or microsystem.

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All Instructors

A- Average (3.610)Most Common: A (47%)

This total also includes data from semesters with unknown instructors.

36 students
WFDCBA

  • 5.22

    /6

    Recommend

  • 5.26

    /6

    Effort

  • 5.32

    /6

    Understanding

  • 5.35

    /6

    Interesting

  • 5.40

    /6

    Activities
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